In the process of plasma enhancement, the occurrence, properties and reaction rate of surface reactions are largely determined by the kinetic energy of incident particles. Along with other contributions such as radiation and reaction enthalpy, it is the part of the total energy inflow that is critical to the surface properties of plasma-treated substrates.

ZIROX, NEOPLAS and Leibniz Institute of Plasma Science and Technology have developed a new probe to measure the true energy inflow on a surface in situ during surface treatment. From this, the magnitude and direction of the energy flux can be characterized and correlated with the properties of the material.

Due to its high sensitivity to process parameter changes and relatively low cost, active thermal probes are well suited for effective quality control and on-line monitoring of plasma processes in industry or research.

Active thermal probes are suitable for vacuum applications and temperatures up to 450°C with energy fluxes up to 2+/- 0.001W /cm2. Variable probe total length allows for any custom version.